Influence of the High-Frequency Capacitive Discharge Regimes on the Parameters of the Plasma in N2/CO2/He Gas Mixtures

Author: Azharonok V.V.   Filatova I.I.   Shimanovich V.D.   Orlov L.N.  

Publisher: Springer Publishing Company

ISSN: 0021-9037

Source: Journal of Applied Spectroscopy, Vol.69, Iss.5, 2002-09, pp. : 761-768

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Abstract