A Raman and photoconductivity analysis of boron-doped SiC : H films deposited using the electron cyclotron resonance method

Author: Yoon S.F.   Ji R.   Ahn J.   Milne W.I.  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.32, Iss.5, 1997-05, pp. : 1163-1167

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