Oxidation of silicon nitride under standard air or microwave-excited air at high temperature and low pressure

Author: Balat M.   Czerniak M.   Berjoan R.  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.32, Iss.5, 1997-05, pp. : 1187-1193

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract