Anisotropic etching of silicon crystals in KOH solution: Part III Experimental and theoretical shapes for 3D structures micro-machined in (hk0) plates

Author： Tellier C.R.  

Publisher： Springer Publishing Company

ISSN： 0022-2461

Source： Journal of Materials Science, Vol.33, Iss.1, 1998-01, pp. : 117-131

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