Discrete β-Ta2O5 crystallite formation in reactively sputtered amorphous thin films

Author： BECKAGE P. J. KNORR D. B. WU X. M. LU T.-M. RYMASZEWSKI E. J.

ISSN： 0022-2461

Source： Journal of Materials Science, Vol.33, Iss.17, 1998-09, pp. : 4375-4379

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