The effect of diluent gases on the growth behavior of CVD SiC films with temperature

Author: Lee Y-J.   Choi D-J.   Park J-Y.   Hong G-W.  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.35, Iss.18, 2000-09, pp. : 4519-4526

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Abstract