Investigating the influence of fabrication process and crystal orientation on shear strength of silicon microcomponents

Author: Chen Q.   Yao D-J.   Kim C-J.   Carman G.P.  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.35, Iss.21, 2000-11, pp. : 5465-5474

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Abstract