Deposition of hydrogenated amorphous carbon films from CH4/Ar plasmas: Ar dilution effects

Author: Valentini L.   Kenny J.M.   Mariotto G.   Tosi P.  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.36, Iss.21, 2001-11, pp. : 5295-5300

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