Sputtering of the aqueous solution of TiCI_3 and the TiO_2 formation

Author： Suzuki T.   Matsushima Y.   Mori Y.   Yamazaki T.   Noma T.  

Publisher： Springer Publishing Company

ISSN： 0022-2461

Source： Journal of Materials Science, Vol.37, Iss.3, 2002-02, pp. : 595-601

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