Micromechanical testing of MEMS materials

Author： Buchheit T. E.   Glass S. J.   Sullivan J. R.   Mani S. S.   Lavan D. A.   Friedmann T. A.   Janek R.  

Publisher： Springer Publishing Company

ISSN： 0022-2461

Source： Journal of Materials Science, Vol.38, Iss.20, 2003-10, pp. : 4081-4086

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