Growth of Ga2O3 thin films on Si(100) substrates using a trimethylgallium and oxygen mixture

Author: Kim Hyoun Woo   Kim Nam Ho   Lee Chongmu  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.39, Iss.10, 2004-05, pp. : 3461-3463

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