RF-power-controlled young's modulus of plasma-polymerized organosilicon films

Author: Cech V.   Vanek J.   Goruppa A.   Jones F.  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.40, Iss.18, 2005-09, pp. : 5099-5102

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Abstract