Effects of annealing temperature on the optical, bonding, structural and electrical properties of nitrogenated amorphous carbon thin films grown by surface wave microwave plasma chemical vapor deposition

Author: Rusop M.   Omer A.   Adhikari S.   Adhikary S.   Uchida H.   Soga T.   Jimbo T.   Umeno M.  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.41, Iss.2, 2006-01, pp. : 537-547

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