Characteristics of nanostructure and electrical properties of Ti thin films as a function of substrate temperature and film thickness

Author: Savaloni H.   Khojier K.   Alaee M.  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.42, Iss.8, 2007-04, pp. : 2603-2611

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