Design and Fabrication of Silcon Microlens with Low SAG for 528(H) × 528(V) Infrared Charge-Coupled Device Application

Author： Ke Caijun   Yi Xinjian   Lai Jianjun   Chen Sihai  

Publisher： Springer Publishing Company

ISSN： 0195-9271

Source： International Journal of Infrared and Millimeter Waves, Vol.26, Iss.1, 2005-01, pp. : 133-146

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