Simulation of Excimer Ultraviolet (EUV) Emission from a Coaxial Xenon Excimer Ultraviolet Lamp Driven by Distorted Bipolar Square Voltages

Author： Jou S.-Y.   Hung C.-T.   Chiu Y.-M.   Wu J.-S.   Wei B.-Y.  

Publisher： Springer Publishing Company

ISSN： 0272-4324

Source： Plasma Chemistry and Plasma Processing, Vol.30, Iss.6, 2010-12, pp. : 907-931

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