High-cycle fatigue of micron-scale polycrystalline silicon films: fracture mechanics analyses of the role of the silica/silicon interface

Author: Muhlstein C.L.   Ritchie R.O.  

Publisher: Springer Publishing Company

ISSN: 0376-9429

Source: International Journal of Fracture, Vol.119, Iss.4, 2003-01, pp. : 449-474

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Abstract