Monte carlo simulation of micro-cracking in polysilicon MEMS exposed to shocks

Author: Mariani Stefano   Martini Roberto   Ghisi Aldo   Corigliano Alberto   Simoni Barbara  

Publisher: Springer Publishing Company

ISSN: 0376-9429

Source: International Journal of Fracture, Vol.167, Iss.1, 2011-01, pp. : 83-101

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract