Determination of the nonlinearity of capacitive sensors along the Z-axis of an atomic force microscope

Author： Zablotskii A.   Sharonov V.   Bormashov V.   Baturin A.   Todua P.  

Publisher： Springer Publishing Company

ISSN： 0543-1972

Source： Measurement Techniques, Vol.56, Iss.3, 2013-06, pp. : 275-277

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