Rule-based data mining for yield improvement in semiconductor manufacturing

Author: Weiss Sholom   Baseman Robert   Tipu Fateh   Collins Christopher   Davies William   Singh Raminderpal   Hopkins John  

Publisher: Springer Publishing Company

ISSN: 0924-669X

Source: Applied Intelligence, Vol.33, Iss.3, 2010-12, pp. : 318-329

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