Synthesis of Nano Silica Particles for Polishing Prepared by Sol–Gel Method

Author: Arai Yasuhiko   Segawa Hiroyo   Yoshida Kazuaki  

Publisher: Springer Publishing Company

ISSN: 0928-0707

Source: Journal of Sol-Gel Science and Technology, Vol.32, Iss.1-3, 2004-12, pp. : 79-83

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