Nanopatterning of diamond films with composite oxide mask of metal octylates in electron beam lithography

Author： Kiyohara Shuji   Takamatsu Hideaki   Motoishi Taku   Mori Katsumi  

Publisher： Springer Publishing Company

ISSN： 0957-4522

Source： Journal of Materials Science: Materials in Electronics, Vol.15, Iss.2, 2004-02, pp. : 99-102

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