Influence of C4F8/Ar/O2 plasma etching on SiO2 surface chemistry

Author: Krastev V.   Reid I.   Galassi C.   Hughes G.   McGlynn E.  

Publisher: Springer Publishing Company

ISSN: 0957-4522

Source: Journal of Materials Science: Materials in Electronics, Vol.16, Iss.8, 2005-08, pp. : 541-547

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