Nanoimprint glass-like carbon molds fabricated with ECR oxygen ion beams using polysiloxane oxide mask

Author: Kiyohara S.   Araki S.   Kurashima Y.   Taguchi Y.   Sugiyama Y.   Omata Y.  

Publisher: Springer Publishing Company

ISSN: 0957-4522

Source: Journal of Materials Science: Materials in Electronics, Vol.22, Iss.2, 2011-02, pp. : 183-188

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