Preparation and characterization of highly c-axis textured MgO buffer layer grown on Si(100) substrate by RF magnetron sputtering for use as growth template of ferroelectric thin film

Author： Shih Wen-Ching   Wang Tzyy-Long   Chiang Ming-Han   Wu Mu-Shiang  

Publisher： Springer Publishing Company

ISSN： 0957-4522

Source： Journal of Materials Science: Materials in Electronics, Vol.22, Iss.4, 2011-04, pp. : 430-436

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Growth of highly c-axis oriented SBN thin films on Si(100) with/without MgO buffer layer by the sol-gel method

By Cao Xiao-Yan   Ye Hui   Shen Zhi-Ru   Deng Nian-Hui   Guo Bing    

Journal of Materials Science, Vol. 39, Iss. 22, 2004-11 ,pp. : 6871-6873

Springer Publishing Company

Access to resources Recommend Favorite

Structural and optical characterization of c-axis textured BaTiO3 thin films on MgO fabricated by RF magnetron sputtering

By Shih Wen-Ching   Chiang Ming-Han  

Journal of Materials Science: Materials in Electronics, Vol. 21, Iss. 8, 2010-08 ,pp. : 844-848

Springer Publishing Company

Access to resources Recommend Favorite

Formation mechanism of preferential c-axis oriented ZnO thin films grown on p-Si substrates

By Lee H. S.   Lee J. Y.   Kim T. W.   Kim D. W.   Cho W. J.  

Journal of Materials Science, Vol. 39, Iss. 10, 2004-05 ,pp. : 3525-3528

Springer Publishing Company

Access to resources Recommend Favorite

Growth of highly c-axis oriented aluminum nitride thin films on β-tantalum bottom electrodes

By Akiyama M.   Ueno N.   Nagao K.   Yamada T.  

Journal of Materials Science, Vol. 41, Iss. 14, 2006-07 ,pp. : 4691-4694

Springer Publishing Company

Access to resources Recommend Favorite

Highly c-axis oriented ZnO film on silica glass using zinc naphthenate precursor

By Kim B. H.   An J. H.   Jeon Y. S.   Jeong J. T.   Kang B. A.   Hwang K. S.  

Journal of Materials Science, Vol. 40, Iss. 1, 2005-01 ,pp. : 237-239

Springer Publishing Company

Access to resources Recommend Favorite