Characterization of Negative Tone Photoresist Based on Acid Catalyzed Dehydration Crosslinking of Novolac Resins Having Pendant Carboxyl Groups

Author： Liu H-H. Chen W-T. Wu F-C.

Publisher： Springer Publishing Company

ISSN： 1022-9760

Source： Journal of Polymer Research, Vol.9, Iss.4, 2002-01, pp. : 251-256

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