Time-modulated CVD process optimized using the taguchi method

Author: Ahmed W.   Ahmed E.   Maryan C.   Jackson M.   Ogwu A.   Ali N.   Neto V.   Gracio J.  

Publisher: Springer Publishing Company

ISSN: 1059-9495

Source: Journal of Materials Engineering and Performance, Vol.15, Iss.2, 2006-04, pp. : 236-241

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Abstract