Effects of Deposition Conditions on Carbon-Film Resistivity and Microstructure

Author: Onoprienko A.   Yanchuk I.  

Publisher: Springer Publishing Company

ISSN: 1068-1302

Source: Powder Metallurgy and Metal Ceramics, Vol.44, Iss.9-10, 2005-09, pp. : 499-504

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract