Porosimetry Measurements on Low Dielectric Constant—Thin Layers by Coupling Spectroscopic Ellipsometry and Solvent Adsorption-Desorption

Author： Revol Patrick Perret Damien Bertin François Fusalba Florence Rouessac Vincent Chabli Amal Passemard Gérard Ayral André

Publisher： Springer Publishing Company

ISSN： 1380-2224

Source： Journal of Porous Materials, Vol.12, Iss.2, 2005-04, pp. : 113-121

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