Electrical properties of nanoporous F doped SiO₂ low-k thin films prepared by sol-gel method with catalyst HF

Author： He Zhi-Wei Liu Xue-Qin Xu Da-Yin Guo Yong-Ping Wang Yin-Yue

ISSN： 1380-2224

Source： Journal of Porous Materials, Vol.13, Iss.3, 2006-08, pp. : 413-417

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Influence of calcination temperature on structural and optical properties of TiO₂-SiO₂ thin films prepared by sol-gel dip coating

By Lee Hak Joon Hahn Sung Hong Kim Eui Jung You Yong Zoo

Journal of Materials Science, Vol. 39, Iss. 11, 2004-06 ,pp. : 3683-3688

Springer Publishing Company

Access to resources Recommend Favorite

Optical properties of SiO₂-TiO₂ sol-gel thin films

By Chrysicopoulou P. Davazoglou D. Trapalis C. Kordas G.

Journal of Materials Science, Vol. 39, Iss. 8, 2004-04 ,pp. : 2835-2839

Springer Publishing Company

Access to resources Recommend Favorite

Effect of Dopant Concentration on Electrical and Optical Properties of Sn-Doped ZnO Thin Films Deposited by Sol-Gel Immersion Method

Advanced Materials Research, Vol. 2015, Iss. 1109, 2015-07 ,pp. : 549-553

Trans Tech Publications

Access to resources Recommend Favorite

Investigation of the Structural, Optical and Electrical Properties of Gadolinium-Doped Zinc Oxide Films Prepared by Sol-Gel Method

Advanced Materials Research, Vol. 2016, Iss. 1133, 2016-02 ,pp. : 424-428

Trans Tech Publications

Access to resources Recommend Favorite

Studies of Fe-doped SiO²/TiO² composite nanoparticles prepared by sol-gel-hydrothermal method

By Li Zhijie Hou Bo Xu Yao Wu Dong Sun Yuhan

Journal of Materials Science, Vol. 40, Iss. 15, 2005-08 ,pp. : 3939-3943

Springer Publishing Company

Access to resources Recommend Favorite