Thermal effects in low-pressure plane plasma apparatus for thin films applications

Author: Golan G.   Axelevitch A.   Sigalov B.   Gorenstein B.  

Publisher: Springer Publishing Company

ISSN: 1388-6150

Source: Journal of Thermal Analysis and Calorimetry, Vol.71, Iss.3, 2003-03, pp. : 893-904

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Abstract