Metal silicides: An integral part of microelectronics

Author: Chen L.  

Publisher: Springer Publishing Company

ISSN: 1543-1851

Source: JOM, Vol.57, Iss.9, 2005-09, pp. : 24-30

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract