Kinetic analysis of NaF vaporization in SiF4-Ar mixture

Author: Kashiwaya Yoshiaki   Cramb Alan  

Publisher: Springer Publishing Company

ISSN: 1543-1916

Source: Metallurgical and Materials Transactions B, Vol.32, Iss.3, 2001-06, pp. : 401-407

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract