An Experimental Study of Fracture of LIGA Ni Micro-Electro-Mechanical Systems Thin Films

Author: Yang Y.   Allameh S.   Boyce B.   Chan K.S.   Soboyejo W.O.  

Publisher: Springer Publishing Company

ISSN: 1543-1940

Source: Metallurgical and Materials Transactions A, Vol.38, Iss.6, 2007-06, pp. : 1223-1230

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Abstract