Failure Analysis of Thermal Actuators, Comb Drives, and Other Microelectromechanical Elements

Author: Tan T.   Weber K.   Dharan C.  

Publisher: Springer Publishing Company

ISSN: 1547-7029

Source: Journal of Failure Analysis & Prevention, Vol.7, Iss.2, 2007-04, pp. : 137-143

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Abstract