Problems and basic research directions in the field of thin-film nanoand microelectromechanical systems of pressure sensors

Author： Belozubov E. Vasil’ev V. Gromkov N.

Publisher： MAIK Nauka/Interperiodica

ISSN： 0005-1179

Source： Automation and Remote Control, Vol.72, Iss.2, 2011-02, pp. : 417-424

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