Time-Resolved Surface Infrared Spectroscopy During Atomic Layer Deposition

Author： Sperling Brent A.   Hoang John   Kimes William A.   Maslar James E.  

Publisher： Society for Applied Spectroscopy

ISSN： 0003-7028

Source： Applied Spectroscopy, Vol.67, Iss.9, 2013-09, pp. : 1003-1012

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