(Ba,Sr)RuO3 Bottom Electrode Deposited by Liqud Delivery Metalorganic Chemical Vapor Deposition for (Ba,Sr)TiO3 High Dielectric

Author: Choi Eun-Suck   Shin Woong-Chul   Yoon Soon-Gil  

Publisher: Taylor & Francis Ltd

ISSN: 0015-0193

Source: Ferroelectrics, Vol.271, Iss.1, 2002-01, pp. : 111-116

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Abstract