Design and System Modeling of a Tri-Axial Microaccelerometer Using Piezoelectric Thin Films

Author： Yu Jyh-Cheng   Lee Chungda   Chang Chiaokai  

Publisher： Taylor & Francis Ltd

ISSN： 0015-0193

Source： Ferroelectrics, Vol.385, Iss.1, 2009-01, pp. : 69-74

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