A 150 mm Wafer Technology for Highly (111) Oriented Pb(Zr,Ti)O3 Films on BaPbO3/Pt Electrode

Author: Vidyarthi V. S.   Suchaneck G.   Reibold M.   Grotzschel R.   Gerlach G.  

Publisher: Taylor & Francis Ltd

ISSN: 0015-0193

Source: Ferroelectrics, Vol.390, Iss.1, 2009-01, pp. : 145-152

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Abstract