Material, Electrical, and Optical Characterizations of High-K Sm₂TiO₅ Dielectric Deposited on Polycrystalline Silicon

Author： Chen Hsiang Kao Chyuan-Haur Lin Chun Wei Liao Chuan Hao

ISSN： 0015-0193

Source： Ferroelectrics, Vol.434, Iss.1, 2012-01, pp. : 58-66

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