Ex- and In-situ Metrology Based on the Shack-Hartmann Technique for Sub-nanometric Metrology

Author： Idir Mourad   Dovillaire Guillaume   Mercere Pascal  

Publisher： Taylor & Francis Ltd

ISSN： 0894-0886

Source： Synchrotron Radiation News, Vol.26, Iss.5, 2013-09, pp. : 23-29

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