Applications of “Dry” Processing in the Microelectronics Industry Using Carbon Dioxide

Author： Jones Charles   Zweber Amy   DeYoung. James   McClain James   Carbonell Ruben   DeSimone Joseph  

Publisher： Taylor & Francis Ltd

ISSN： 1040-8436

Source： Critical Reviews in Solid State and Material Sciences, Vol.29, Iss.3-4, 2004-07, pp. : 97-109

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