Focused, Nanoscale Electron-Beam-Induced Deposition and Etching

Author： Randolph S. J.   Fowlkes J. D.   Rack P. D.  

Publisher： Taylor & Francis Ltd

ISSN： 1040-8436

Source： Critical Reviews in Solid State and Material Sciences, Vol.31, Iss.3, 2006-09, pp. : 55-89

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