Ge laser-generated plasma for ion implantation

Author: Giuffrida L.   Torrisi L.   Czarnecka A.   Wołowski J.   Quarta G.   Calcagnile L.   Lorusso A.   Nassisi V.  

Publisher: Taylor & Francis Ltd

ISSN: 1042-0150

Source: Radiation Effects and Defects in Solids, Vol.163, Iss.4-6, 2008-04, pp. : 401-409

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