Integration of Coplanar Barium-Strontium Titanate Tunable Capacitors on Micro-Machined Silicon

Author: Noeth A.   Yamada T.   Tagantsev A. K.   Setter N.  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.115, Iss.1, 2010-01, pp. : 110-119

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Abstract