Preparation and Characterization of BaTiO3 Thin Films Using Reactive Sputtering Method with Metal Target

Author： Osumi Tsuyoshi   Nishide Masamichi   Funakubo Hiroshi   Shima Hiromi   Nishida Ken   Yamamoto Takashi  

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.133, Iss.1, 2012-01, pp. : 42-48

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