Oxidized Titanium as a Bottom Electrode Adhesion Layer for the Multilayer (Ba,Sr)TiO3 Capacitors

Author: Koutsaroff I. P.   Zelner M.   Woo P.   McNeil L.   Buchbinder M.   Cervin-Lawry A.  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.45, Iss.1, 2002-01, pp. : 97-103

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Abstract