Electrical and Structural Properities of PZT Films Deposited by MOCVD Using Ultrasonic Nebulization

Author: Lee Choon-Ho   Yeom Jung-Hoon  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.47, Iss.1, 2002-01, pp. : 167-176

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Abstract