Reduced Thermal Budget Process for SBT Thin Film in Planer Type Stack Cell FeRAMs

Author: Karasawa Junichi   Hamada Yasuaki   Ohashi Koji   Natori Eiji   Oguchi Koichi   Shimoda Tatsuya   Joshi Vikram   Solayappan Nararyan   Lim Myungho   Celinska Jolanta   Mcmillan Larry D.   De Araujo Carlos A. Paz  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.48, Iss.1, 2002-01, pp. : 193-202

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